Meeting the demands of next-generation chips with next generation tools
Nanomotion’s piezoelectric motor technology is revolutionizing the semiconductor industry by enabling sub-nanometer motion capabilities. Our advanced motion systems are designed to perform in high vacuum and clean environments, ensuring precise control and stability for semiconductor applications.
Key Features:
- High Stability and precision
- Advanced Drive Technology such as AC, UHR and DC Modes
- Low Signal-to-Noise Ratio
- Optimized Control Algorithms
- High Stiffness and Dynamic performance of piezo motors
Want to find out more about our sub-nano capabilities?
Check out our latest news:
Request a Quote Today
Discuss your unique requirements or request a quote for your next project
0.25NM Resolution Stage Stage for Semiconductor Metrology
Figure 1. Test Graph Description
Figure 2. Prototyped 0.25NM Resolution Stage