Sub-Nanometer Capabilities

Meeting the demands of next-generation chips with next generation tools

Nanomotion’s piezoelectric motor technology is revolutionizing the semiconductor industry by enabling sub-nanometer motion capabilities. Our advanced motion systems are designed to perform in high vacuum and clean environments, ensuring precise control and stability for semiconductor applications. 

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0.25NM Resolution Stage Stage for Semiconductor Metrology

s110 stage

Figure 1. Test Graph Description

stage

Figure 2. Prototyped 0.25NM Resolution Stage

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