Additional information
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XCDX5 Motion Controller
The FB Series of standard stages are driven by Nanomotion’s ultrasonic standing wave piezo motors, providing closed loop, servo motion with an optical encoder. The standard stages provide single and multi‐axis motion performance for a wide range of applications in Semiconductor, Biomedical, and Instrumentation markets. All stages are available in standard and vacuum configurations, in various sizes, yielding required travel and performance criteria.
| Environment | |
|---|---|
| Industry | |
| Size |
The FB Series of standard stages are driven by Nanomotion’s ultrasonic standing wave piezo motors, providing closed loop, servo motion with an optical encoder. The standard stages provide single and multi‐axis motion performance for a wide range of applications in Semiconductor, Biomedical, and Instrumentation markets. All stages are available in standard and vacuum configurations, in various sizes, yielding required travel and performance criteria.
Model | FGS013S125 | FGS013S160 |
Stage Plate Material | Aluminum- Black Anodized | |
Motor | HR4 Piezo, ultrasonic standing wave | |
Bearing Type | Precision crossed rollers with anti-migration device | |
Encoder | Linear optical encoder with gold tape scale | |
Cable lengths (m) | 3m | |
MTBF (hours) | 30,000 | |
Stage Mass | 773g | 842g |
Moving Mass | 461g | 423g |
RoSH | Complaint | |
Vacuum Compatible Options | High Vacuum (to 10-7 Torr) / UHV (to 10-10 Torr) available | |
Model | FGS013S125 | FGS013S160 | |
Travel Range (deg) | ±10° | ±10° | |
Encoder Resolution | Standard | 0.171 arc sec | 0.134 arc sec |
Optional | 0.0171 arc sec | 0.0134 arc sec | |
Bi-directional Repeatability | Standard | 2 arc sec | 2 arc sec |
Optional | 0.2 arc sec | 0.2 arc sec | |
Minimum Incremental Move Convergence (encoder & control dependent) | AC Mode | 0.165 arc sec | 0.128 arc sec |
UHR Mode | 0.0082 arc sec | 0.0064 arc sec | |
DC Mode | 0.000165 arc sec | 0.000129 arc sec | |
Maximum Velocity (deg/sec) | 110 deg/sec | 85 deg/sec | |
Load Capacity (kg) | 3kg | 3kg | |
Inertial Capacity (kg.m²) | 0.0512 kg.m² | 0.083 kg.m² | |
Dynamic Stall Force | 2040Nm | 2600Nm | |
Motor Stiffness | 0.045 N*m/µrad | 0.074 N*m/µrad | |
Holding force without power | 1836Nm | 2340Nm |
